Microfabricated AC impedance sensor
AssigneeThe Regents of the University of California
InventorsPeter Krulevitch, Harold D. Ackler, Frederick Becker, Bernhard E. Boser, Adam B. Eldredge, Christopher K. Fuller, Peter R. C. Gascoyne, Julie K. Hamilton, Stefan P. Swierkowski, Xiao-Bo Wang
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