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US 6,433,917 B1Granted
Light modulation device and system
AssigneeBall Semiconductor, Inc.
InventorsWenhui Mei, Kin Foong Chan
Life of this patent
Estimating the term…
Abstract
A light modulation element, device, and system is discussed. The light modulation element includes three electrodes, a flexible member, and a mirror. The flexible member is connected between the three electrodes so that the first and second electrodes are on one side and the third electrode is on the opposite side of the flexible member. The mirror is attached to the flexible member so that it can move therewith. The flexible member moves responsive to an external electrostatic force provided by one or more of the three electrodes so that the mirror is positioned in a predetermined position responsive to the state of the flexible member.
Claims42
A light modulation element comprising:
- a first, second, and third electrode;
- a flexible member connected between the three electrodes so that the first and second electrodes are on one side of the flexible member and the third electrode is on the opposite side of the flexible member, wherein the flexible member is responsive to an external force provided by one or more of the three electrodes;
- a mirror attached to the flexible member;
- and
- a first gap between the flexible member and the first and second electrodes so that a portion the flexible member can move vertically between a first and second state;
- wherein the mirror is vertically positioned in a predetermined position responsive to the state of the flexible member.
3 more elements
A light modulation element comprising:
- a substrate;
- first and second electrodes positioned adjacent to the substrate;
- first and second support members connected to the substrate;
- a flexible member spanning between the first and second support members and extending over and above the first and second electrodes, such that the second electrode is near a center portion of the flexible member;
- a third electrode positioned above the flexible member;
- and
- a mirror connected to and extending above the flexible member, the mirror operable to be perpendicularly displaced relative to the substrate when the flexible member is displaced.
4 more elements
A light modulation element comprising:
- a substrate;
- first, second, and third electrodes connected to the substrate;
- a flexible member;
- means connected to the substrate for supporting the flexible member to extend over and above the three electrodes, so that a gap is formed between the flexible member and the three electrodes thereby allowing the flexible member to move between a first and second state;
- a mirror extending above the flexible member;
- and
- means for connecting the mirror to the flexible member so that the mirror stays parallel with the substrate and a distance between the substrate and the mirror is controlled by the state of the flexible member;
- wherein the first and second electrodes are situated to hold the flexible member in a prior state responsive to a hold voltage applied thereto, and
- wherein the third electrode is situated to selectively move the flexible member between the first and second states responsive to a data voltage applied thereto.
6 more elements
A device comprising a substrate and an array of light modulation elements, each light modulation element comprising:
- first and second electrodes positioned proximate to the substrate;
- a flexible member extending over and above the first and second electrodes, such that the flexible member can move between a first and second state;
- a third electrode positioned above the flexible member;
- and
- a mirror connected to and extending above the flexible member such that a vertical distance of the mirror from the substrate is controlled by the state of the flexible member.
2 more elements
A projection system comprising:
- a light source for producing a light of wavelength λ;
- a beamsplitter having a reflective surface for receiving the light and directing a first portion of the light to a micro-mirror device and a second portion of the light to a reflecting device;
- the micro-mirror device comprising a plurality of individual mirrors manipulatable between a first and second state, wherein the micro-mirror device is positioned a distance (d) between a point on the reflective surface and a mirror of the micro-mirror device, when in the first state;
- and
- the reflecting device positioned the distance (d) between the point on the reflecting device and the reflective surface;
- wherein the micro-mirror device, beamsplitter, and reflecting device are positioned so that the first and second portions of light will meet after reflecting off the micro-mirror device and reflecting device, respectively;
- and
- wherein the states of the micro-mirror device are for controlling a distance traveled by the first portion of light so that when the first and second portions of light meet, an aspect of the light can be selectively modulated.
5 more elements
A projection system comprising:
- a light source for producing a light of wavelength λ;
- means for reflecting the light
- a micro-mirror device comprises a substrate and a plurality of elements connected to the substrate, with each element comprising first, second and third electrodes, a flexible member extending over and above the first and second electrodes, and a mirror connected to the flexible member so that the mirror can move between a first and second state responsive to movement of the flexible member, the mirror being connected to the flexible member so that a plane of the mirror when in the first state is parallel to the plane of the mirror when in the second state;
- a beamsplitter having a reflective surface for receiving the light and directing a first portion of the light to the micro-mirror device and a second portion to the means for reflecting light,
- wherein the micro-mirror device, beamsplitter, and means for reflecting light are positioned so that the first and second portions of light will meet after reflecting off the micro-mirror device and means for reflecting light, respectively.
2 more elements
Dependencies are inferred from the claim text.