Heating element for use in a hot filament chemical vapor deposition chamber
AssigneeSI Diamond Technology, Inc.
InventorZhidan Li Tolt
Life of this patent
Estimating the term…
Abstract
A carbon deposition chamber is provided with several advantages. The heating filaments are permitted to expand and contract without breakage by permitting the electrode attached to one end of the filaments to move freely as the filaments change in length. The substrate is permitted to rotate back-and-forth to permit more even deposition of carbon films onto the substrate. The gas mixture used within the deposition process is expressed from tubing through three zones, which are each individually determined with needle valves. The substrate and the heating filaments are cooled to a temperature to prevent carbonization by permitting a cooling fluid to be passed through tubing connected to these elements in a heat sink like manner.
Claims40
A heating element adaptable for use in a reactor, comprising:
- a first electrode;
- a movable electrode spaced from said first electrode;
- a heating filament array coupled to said first electrode and to said movable electrode, wherein said heating filament array comprises a plurality of electrically conductive filaments, each of said filaments being fixedly secured at a first end to said first electrode and fixedly secured at a second end to said movable electrode;
- and
- wherein said first electrode and said second electrode contain a void adaptable for the passage of a cooling fluid.
A reactor, comprising:
- a first electrode;
- a movable electrode spaced from said first electrode, wherein said movable electrode is restrained from moving out of a plane defined by said first electrode and said movable electrode;
- a first support structure for said first electrode and a second support structure for said second electrode and a temperature reduction means for said first and second support structure;
- and
- a heating filament array coupled to said first electrode and to said movable electrode, wherein said heating filament array comprises a plurality of substantially linear, electrically conductive filaments, wherein each of said filaments being fixedly secured at a first end to said first electrode and fixedly secured at a second end to said movable electrode.
A heating element adaptable for use in a reactor, comprising:
- a first electrode having a void adapted for the passage of a cooling fluid;
- a movable electrode having a void adapted for the passage of a cooling fluid, said movable electrode spaced from said first electrode;
- and
- a heating filament array coupled to said first electrode and to said movable electrode, wherein said heating filament array comprises a plurality of electrically conductive filaments, each of said filaments being fixedly secured at a first end to said first electrode and fixedly secured at a second end to said movable electrode.
A reactor, comprising:
- a first electrode;
- a movable electrode spaced from said first electrode, wherein said movable electrode is restrained from moving out of a plane defined by said first electrode and said movable electrode;
- a first support structure for said first electrode and a second support structure for said second electrode and a temperature reduction means for said first and second support structure;
- a heating filament array coupled to said first electrode and to said movable electrode, wherein said heating filament array comprises a plurality of substantially linear, electrically conductive filaments, wherein each of said filaments being fixedly secured at a first end to said first electrode and fixedly secured at a second end to said movable electrode;
- at least two independently controllable gas dispersion elements emitting a gas along a gas path substantially between said first electrode and said movable electrode;
- and
- a substrate support mounted on a rotatable, hollow turning axle slidably mounted to said reactor.
A reactor, comprising:
- a first electrode having a void adapted for the passage of a cooling fluid;
- a movable electrode having a void adapted for the passage of a cooling fluid, said movable electrode spaced from said first electrode;
- a heating filament array coupled to said first electrode and to said movable electrode, wherein said heating filament array comprises a plurality of electrically conductive filaments, each of said filaments being fixedly secured at a first end to said first electrode and fixedly secured at a second end to said movable electrode;
- at least two independently controllable gas dispersion elements emitting a gas along a gas path substantially between said first electrode and said movable electrode;
- and
- a substrate support mounted on a rotatable, hollow turning axle slidably mounted to said reactor.
Dependencies are inferred from the claim text.