Method for manufacturing thin film transistor array panel for liquid crystal display

A method for manufacturing a thin film transistor array panel for a liquid crystal display, comprising the steps of:

• forming a gate wire including a plurality of gate lines and a plurality of gate electrodes connected to the gate lines, and a common wire including a plurality of common electrodes on an insulating substrate;
• forming a gate insulating layer pattern covering the gate wire and the common wire;
• forming a semiconductor pattern on the gate insulating layer;
• forming an ohmic contact layer pattern on the semiconductor pattern;
• forming a data wire on the ohmic contact layer pattern, the data wire including a plurality of data lines, a plurality of source electrodes connected to the data lines, and a plurality of drain electrodes separated from the source electrodes;
• forming a passivation layer pattern covering the data wire except for a part of the drain electrode;
• and
• forming a plurality of pixel electrodes that are connected to the drain electrodes and cooperate with the common electrodes to generate electric fields,
• wherein the source electrodes and the drain electrodes are separated by a photolithography process using a photoresist layer pattern having portions of different thickness, and
• wherein the portions include a first portion located between the source electrodes and the drain electrodes, a second portion thicker than the first portion and a third portion thinner than the first portion.