Method and apparatus for optimal wafer-by-wafer processing
AssigneeAdvanced Micro Devices, Inc.
InventorAnthony J. Toprac
Life of this patent
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Abstract
The present invention provides for a method and an apparatus for optimal wafer-by-wafer processing. Semiconductor devices are identified for wafer-by-wafer analysis. At least one value of a controlled variable in the wafer-by-wafer analysis is identified. A trajectory of recipes is created for the identified semiconductor devices. A feedback implementation of wafer-by-wafer control is performed using the trajectory of recipes upon the identified semiconductor devices. A feed-forward implementation of wafer-by-wafer control is performed using the trajectory of recipes upon the identified semiconductor devices.
Claims41
A method for optimal wafer-by-wafer processing, comprising:
- identifying semiconductor devices for wafer-by-wafer analysis;
- identifying at least one value of a controlled variable in said wafer-by-wafer analysis;
- creating a trajectory of recipes for said identified semiconductor devices;
- performing a feedback implementation of wafer-by-wafer control using said trajectory of recipes upon said identified semiconductor devices;
- and
- performing a feed-forward implementation of wafer-by-wafer control using said trajectory of recipes upon said identified semiconductor devices.
An apparatus for optimal wafer-by-wafer processing, comprising:
- means for identifying semiconductor devices for wafer-by-wafer analysis;
- means for identifying at least one value of a controlled variable in said wafer-by-wafer analysis;
- means for creating a trajectory of recipes for said identified semiconductor devices;
- means for performing a feedback implementation of wafer-by-wafer control using said trajectory of recipes upon said identified semiconductor devices;
- and
- means for performing a feed-forward implementation of wafer-by-wafer control using said trajectory of recipes upon said identified semiconductor devices.
A computer readable program storage device encoded with instructions that, when executed by a computer, performs a method for optimal wafer-by-wafer processing, comprising:
- identifying semiconductor devices for wafer-by-wafer analysis;
- identifying at least one value of a controlled variable in said wafer-by-wafer analysis creating a trajectory of recipes for said identified semiconductor devices;
- performing a feedback implementation of wafer-by-wafer control using said trajectory of recipes upon said identified semiconductor devices;
- and
- performing a feed-forward implementation of wafer-by-wafer control using said trajectory of recipes upon said identified semiconductor devices.
Dependencies are inferred from the claim text.