Back to results
US 6,425,287 B1Granted
Microflow sensor element and manufacturing method thereof
AssigneeHoriba, Ltd.
InventorsKoji Tominaga, Shuji Takada, Koichi Matsumoto
Life of this patent
Estimating the term…
Abstract
A microflow sensor element for obtaining a response quickly with high response sensitivity regardless of the direction of an air flow. A pyroelectric detection unit is provided on a substrate, the pyroelectric detection unit having an upper and a lower electrode which are respectively provided on the surface and undersurface of a ferroelectric thin film. A heater portion whose temperature is modulated periodically as designated is provided on the upper electrode via a thin film of insulating material.
Claims3
A microflow sensor element comprising:
- a substrate;
- a pyroelectric detection portion formed on said substrate, including a lower electrode formed on said substrate, a ferroelectric thin film formed on said lower electrode, and an upper electrode formed on said ferroelectric thin film;
- an insulating film formed on said pyroelectric detection portion;
- and
- a heater portion whose temperature is modulated periodically as designated provided on said insulating film.
2 more elements
Dependencies are inferred from the claim text.