Sample separating apparatus and method, and substrate manufacturing method

A separating apparatus for separating a plate-like sample having an internal fragile layer at the fragile layer comprising:

• a jet unit for ejecting a fluid to the sample;
• and
• a pair of holding portions opposing each other to sandwich and hold the sample,
• wherein said pair of holding portions hold the sample which can corrugate due to a pressure of the fluid ejected from said jet unit and injected into the sample.

A separating apparatus for separating a composite member which is formed by bonding a plurality of members and has a separation region formed by anodizing or ion implantation, the apparatus comprising:

• support means for supporting the composite member;
• and
• pressure applying means for separating the composite member by applying a pressure of a fluid to a side surface of the composite member,
• wherein said support means sandwiches and holds the composite member by a pair of holding portions to allow the composite member to expand at a vicinity of a central portion due to a pressure of the fluid.

The separating apparatus for separating a composite member which is formed by bonding a plurality of members and has a separation region formed by anodizing or ion implantation, the apparatus comprising:

• support means for supporting the composite member;
• and
• pressure applying means for separating the composite member by applying a pressure of fluid to a side surface of the composite member,
• wherein said support means sandwiches and holds the composite member by a pair of holding portions to allow the composite member by a pair of holding portions to allow the composite member to corrugate due to a pressure of the fluid.