Method of adjusting frequency of piezoelectric resonance element by removing material from a thicker electrode or adding, material to a thinner electrode
AssigneeMurata Manufacturing Co., Ltd.
InventorSachihito Nakafuku
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Abstract
A method of adjusting a frequency of an energy-trap type piezoelectric resonance element includes the steps of preparing a piezoelectric resonance element including first and second vibration electrodes formed partially on both of the main surfaces of a piezoelectric plate, the thickness of the first vibration electrode being larger than that of the second vibration electrode, and modifying the first vibration electrode or the second vibration electrode in such a manner that the thicknesses of the first and second vibration electrode electrodes are substantially equal to each other such that the piezoelectric resonance element has a desired frequency.
Claims17
A method of adjusting a frequency of an electronic component, comprising the steps of:
- preparing a piezoelectric resonance element including a piezoelectric plate having two main surfaces, first and second vibration electrodes formed partially on both of the main surfaces of the piezoelectric plate, and opposed to each other with the piezoelectric plate disposed therebetween, the thickness of the first vibration electrode being larger than that of the second vibration electrode;
- processing at least one of the first vibration electrode and the second vibration electrode so that the thicknesses of the first and second vibration electrodes become closer to each other, and such that the piezoelectric resonance element has a desired frequency;
- and
- measuring the resonance frequency of the piezoelectric resonator after the step of preparing the piezoelectric resonance element;
- wherein
- the processing step is carried out in such a manner that when the resonance frequency is higher than a desired frequency, the thickness of the second vibration electrode is increased, and when the resonance frequency of the piezoelectric resonance element is lower than the desired frequency, the thickness of the first vibration electrode is decreased.
Dependencies are inferred from the claim text.