Pad designs and structures for a versatile materials processing apparatus
AssigneeNutool, Inc.
InventorsCyprian Uzoh, Bulent Basol, Homayoun Talieh
Life of this patent
Estimating the term…
Abstract
An apparatus capable of assisting in controlling an electrolyte flow and an electric field distribution used for processing a substrate is provided. It includes a rigid member having a top surface of a predetermined shape and a bottom surface. The rigid member contains a plurality of channels, each forming a passage from the top surface to the bottom surface, and each allowing the electrolyte and electric field flow therethrough. A pad is attached to the rigid member via a fastener. The pad also allows for electrolyte and electric field flow therethrough to the substrate.
Claims52
An apparatus capable of assisting in controlling an electrolyte flow and an electric field distribution used for processing a substrate, comprising:
- a rigid member having a top surface of a predetermined shape and a bottom surface, wherein the rigid member contains a plurality of channels, each forming a passage from the top surface to the bottom surface, and each allowing the electrolyte and electric field flow therethrough;
- a pad attachable to the rigid member, the pad also allowing for electrolyte and electric field flow therethrough to the substrate;
- and
- a fastener attaching the pad to the rigid member.
Dependencies are inferred from the claim text.