Rotary joint
AssigneeNippon Pillar Packing Co., Ltd.
InventorsJunyi Omiya, Masato Wada
Life of this patent
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AssigneeNippon Pillar Packing Co., Ltd.
InventorsJunyi Omiya, Masato Wada
Estimating the term…
A mechanical seal rotary joint of the end-face contact type which permits slurry fluids, such as polishing solution, to pass through a fluid passage without leaking out of the relatively rotating contact area therein. The rotary joint of the present invention comprises: a first joint body (1); a second joint body (2) connected rotatably to the first joint body (1); a prime seal unit (3) provided between the opposed end portions (11, 21) of the two joint bodies (1, 2); and a continuous line of prime fluid passage (6). The prime seal unit (3) is a mechanical seal comprising: a stationary seal ring (30) fixed on the end portion (21) of the second joint body (2) concentrically with the axis of rotation as its center; a movable seal ring (31) held on the end portion (11) of the first joint body (1) and concentric with and opposite to the stationary seal ring (30); a rotation stopper (32a) provided on the outer circumferential side of the movable seal ring (31) for preventing the relative rotation of the seal ring (31) while allowing the seal ring (31) to move in the axial direction; and springs (33a) to thrust and press the movable seal ring (31) against the stationary seal ring (30). Thus, the prime seal unit (3) is constructed so as to provide a seal between the inner circumferential region (3a) and the outer circumferential region (3b) of the two seal rings (30, 31). The prime fluid passage (6) is made up of the inner circumferential regions (3a) of the two seal ring (30, 31), a first primary passage section (60) passing through the first joint body (1) and leading into the inner circumferential region (3a) and a second prime fluid passage section (61) passing through the second joint body (2) and leading into the inner circumferential region (3a). A slurry fluid (106), such as a polishing solution, flows through the prime fluid passage (6) without leaking out of the relatively rotating section of the joint bodies (1, 2).
A rotary joint comprising:
The rotary joint as defined in claim 1 or claim 3, wherein the inner and outer circumferential surfaces of the tapered portion of the seal ring form circular cone surfaces which are at an identical angle of 105 to 150 degrees with respect the seal end face.
A rotary joint comprising:
A rotary joint comprising:
A rotary joint comprising:
Dependencies are inferred from the claim text.