Methods for low and ambient temperature preparation of precursors of compounds of group III metals and group V elements
AssigneeEltron Research, Inc.
InventorsMichael T. Carter, William J. Donahue
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Abstract
Processes are provided for preparation of precursors of Group III-V compounds, i.e., nitrides, phosphides, arsenides, antimonides and bismuthides of boron, aluminum, gallium and indium. The precursors are easily converted, e.g., by thermal decomposition, to the Group III-V compounds which are useful as thin-film coatings for aerospace components or as powders which may be shaped as desired.
Claims22
A process for preparation of a precursor of a Group III-V compound wherein said precursor comprises M, X and V
- where M is a Group III metal selected from the group consisting of boron, aluminum, gallium and indium;
- X is halide;
- and
- V is a Group V element selected from the group consisting of nitrogen, phosphorous, arsenic, antimony and bismuth;
- said process comprising:
- (a) preparing an active metal halide ion comprising M by a process comprising forming a mixture of a trihalide of M with an organic halide RX′,
- where R is an asymmetrical organic cation, and
- X′ is a halide which may be the same or different from X,
- at a molar ratio of MX3 to RX′ such that said mixture forms an acidic salt comprising an active metal halide ion comprising M, X and X′ which is molten at about 200° C. or less;
- and
- (b) contacting said active halide ion with a V-containing compound whereby said precursor is formed.
A process for preparation of a precursor of a metal nitride which comprises M, nitrogen, and chloride,
- where M is a metal selected from the group consisting of aluminum, gallium, and indium,
- comprising:
- (a) preparing an active metal chloride ion by a process comprising forming a mixture of a trichloride of said metal with an organic chloride selected from the group consisting of 1-butylpyridinium chloride (BPC), 1-ethyl-3-methylimidazolium chloride (MEIC), and trimethylphenylammonium chloride (TMPACl) at a molar ratio of said metal trichloride to said organic chloride of at least about 3:1 whereby said mixture forms a molten salt comprising an active metal chloride ion at about 200° C. or less;
- and
- (b) contacting said active metal chloride ion with ammonia or hydrazine whereby said precursor is formed.
Dependencies are inferred from the claim text.