Apparatus for reducing vibration inputs to a device and/or for micropositioning

An actuator apparatus comprising:

• a housing having an opening;
• a chamber arranged within said housing and having a deflectable portion and a movable wall, said chamber having an inner portion with a relatively incompressible fluid contained therein;
• at least one actuator device coupled to said movable wall and said housing and being movable in a predetermined direction;
• and
• a movable end portion located at the opening of said housing and arranged so as to be contactable with the fluid;
• wherein said moveable wall is moved causing the deflectable portion to be deflected in response to the movement of the at least one actuator device, and wherein the movement of said movable wall causes a first volume of the fluid to be displaced and the deflection of the deflectable portion causes a second volume of the fluid to be displaced which together cause the end portion to be moved an amount greater than that which would result from displacing only the first volume of the fluid, and wherein a distance across a cross-section of the inner portion of said chamber prior to movement of said movable wall is greater than the distance across the cross-section of the inner portion of said chamber after the movement of said movable wall.

An actuator apparatus comprising:

• at least one actuator device movable in a predetermined direction;
• a chamber having an outlet portion, a deflectable portion, and a movable wall coupled to the at least one actuator device, said chamber having an inner portion with a relatively incompressible fluid contained therein;
• and
• a movable end portion located at the outlet portion of said chamber;
• wherein said moveable wall is moved causing the deflectable portion to be deflected inward so as to decrease a volume of said inner portion in response to the movement of the at least one actuator device, and wherein the movement of said movable wall causes a first volume of the fluid to be displaced and the deflection of the deflectable portion causes a second volume of the fluid to be displaced which together cause the end portion to be moved an amount greater than that which would result from displacing only the first volume of the fluid.

An actuator apparatus comprising:

• a housing having an opening;
• a chamber arranged within said housing and having a deflectable portion and a movable wall, said chamber having an inner portion with a relatively incompressible fluid contained therein;
• at least one actuator device coupled to said movable wall and said housing and being movable in a predetermined direction;
• and
• a movable end portion located at the opening of said housing and arranged so as to be contactable with the fluid;
• wherein said moveable wall is moved causing the deflectable portion to be deflected inward so as to decrease a volume of said inner portion in response to the movement of the at least one actuator device, and wherein the movement of said movable wall causes a first volume of the fluid to be displaced and the deflection of the deflectable portion causes a second volume of the fluid to be displaced which together cause the end portion to be moved an amount greater than that which would result from displacing only the first volume of the fluid.

An actuator apparatus comprising:

• at least one actuator device movable in a predetermined direction;
• a chamber having an outlet portion, a plurality of deflectable panels arranged such that two adjacent panels are separated therebetween by a respective flexural joint which allow the panels to be deflected in an inward direction, and a movable wall coupled to the at least one actuator device, said chamber having a relatively incompressible fluid contained therein;
• and
• a movable end portion located at the outlet portion of said chamber;
• wherein said moveable wall is moved causing the deflectable panels to be deflected inward in response to the movement of the at least one actuator device, and wherein the movement of said movable wall causes a first volume of the fluid to be displaced and the deflection of the deflectable panels causes a second volume of the fluid to be displaced which together cause the end portion to be moved an amount greater than that which would result from displacing only the first volume of the fluid.

An actuator apparatus comprising:

• at least one actuator device movable in a predetermined direction;
• a chamber having an outlet portion, a plurality of deflectable walls arranged such that two adjacent walls are separated therebetween by a respective longitudinal flexure which allow the walls to be deflected in an inward direction, and a movable wall coupled to the at least one actuator device, said chamber having a relatively incompressible fluid contained therein;
• and
• a movable end portion located at the outlet portion of said chamber;
• wherein said moveable wall is moved causing the deflectable walls to be deflected inward in response to the movement of the at least one actuator device, and wherein the movement of said movable wall causes a first volume of the fluid to be displaced and the inward deflection of the deflectable walls causes a second volume of the fluid to be displaced which together cause the end portion to be moved an amount greater than that which would result from displacing only the first volume of the fluid.