Voltage tuned dielectric varactors with bottom electrodes
AssigneeParatek Microwave, Inc.
InventorsYongfei Zhu, Louise C. Sengupta
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Abstract
A voltage tunable dielectric varactor includes a substrate having a first dielectric constant and having generally a planar surface, first and second electrodes positioned on the generally planar surface of the substrate, the first and second electrodes being separated to form a first gap therebetween; a tunable dielectric layer positioned on the first and second electrodes and in the first gap, the tunable dielectric layer having a second dielectric constant greater than the first dielectric constant; and third and fourth electrodes positioned on a surface of the tunable dielectric layer opposite the first and second electrodes, the third and fourth electrodes being separated to form a second gap therebetween.
Claims12
A voltage tunable dielectric varactor comprising:
- a substrate having a first dielectric constant and having a generally planar surface;
- first and second electrodes positioned on the generally planar surface of the substrate said first and second electrodes being separated to form a first gap therebetween;
- a tunable dielectric layer positioned on the first and second electrodes and in said first gap, the tunable dielectric layer having a second dielectric constant greater than said first dielectric constant;
- and
- third and fourth electrodes positioned on a surface of the tunable dielectric layer opposite the first and second electrodes, said third and fourth electrodes being separated to form a second gap therebetween.
Dependencies are inferred from the claim text.