Single-side polishing method for substrate edge, and apparatus therefor
AssigneeSpeedFam-IPEC Corporation
InventorsShunji Hakomori, Toru Asai, Noriaki Mizuno
Life of this patent
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Abstract
A single-side polishing method, and an apparatus therefor, for the upper surface and the end face of a substrate edge with a polishing strip are provided. The apparatus comprises a substrate holding member rotatably holding the substrate and a supporting a member capable of coming into contact with and retreating from the substrate holding member; a moving section pressed by a force imparting member against a single side and an end face of the substrate edge via the polishing strip is arranged so that the polishing strip polishes the side and the end face of the substrate edge upon rotation of the substrate.
Claims7
A single-side polishing method for a substrate edge of a substrate, comprising the steps of bringing a moving section having a surface into contact with said substrate edge with a polishing strip disposed therebetween, applying a force by a force imparting member to press the polishing strip against a side and an end face of said substrate edge, and rotating said substrate for polishing said side and said end face.
a single-side polishing apparatus for a substrate edge of a substrate, comprising:
- a substrate holding member for rotatably holding said substrate;
- and
- a supporting member moving relatively into contact with and retreating from said substrate holding member, said supporting member have a moving section that comes into contact with a single side and an end face of said substrate edge with a polishing strip disposed therebetween.
A single-side polishing apparatus for a substrate edge, comprising:
- a substrate holding member for rotatably holding a substrate;
- a supporting member capable of moving relatively into contact with and retreating from said substrate holding member, said supporting member comprises a fixing section to the substrate and a vertically movable moving section, said moving section, given a force by a force imparting member, is capable of coming into contact with a side of the substrate edge;
- and
- a polishing strip, positioned between said moving section and the substrate, for contacting the side and an end face of the substrate edge.
Dependencies are inferred from the claim text.