High electric field, high pressure light source
AssigneeRutgers, The State University
InventorsManfred Salvermoser, Daniel E. Murnick
Life of this patent
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Abstract
A method of generating light comprising the step of applying an electric field to an excimer-forming gas such as a gas mixture containing noble gases and hydrogen or halogen, and providing free electrons in the gas. The electric field is configured to accelerate electrons to at least the energy required to form excimers, but in at least one region of the electric field, the field does not substantially ionize the gas, so that the field does not induce arcing through the gas. For example, electrons can be injected from one or more field emission electrodes (18) such as one or more a metal needle tip conductors, whereas the electric field can be a field between the field emission electrodes and a counterelectrode (13).
Claims40
A method of forming excimers in a gas comprising the steps of:
- (a) providing free electrons in said gas;
- and
- (b) imposing an electric field within a region of said gas so as to accelerate said free electrons, said electric field being configured so that (i) within a first region of said gas, said free electrons have mean energy equal to or greater than the excitation energy required to form the excimer and (ii) within at least one region of the gas, said free electrons have mean energy less than the ionization energy of the gas, whereby said free electrons excite the gas and form excimers without causing arcing.
Apparatus for forming excimers in a gas comprising:
- (a) a chamber for holding a gas;
- (b) means for providing free electrons in said gas;
- and
- (c) means for imposing an electric field within a region of said gas so as to accelerate said free electrons, said electric field being configured so that (i) within a first region of said gas, said free electrons have mean energy equal to or greater than the excitation energy required to form the excimer and (ii) within at least one region of the gas, said free electrons have mean energy less than the ionization energy of the gas, whereby said free electrons excite the gas and form excimers without causing arcing.
Apparatus for forming excimers in a gas comprising:
- (a) a chamber for holding a gas;
- (b) an excimer-forming gas within said chamber;
- (c) at least one field emission electrode which emits free electrons disposed within said chamber;
- (d) a counterelectrode within said chamber remote from said field emission electrode;
- and
- (e) a potential source having a negative terminal connected to said at least one field emission electrode and said a positive terminal connected to said counterelectrode for imposing an electric field within a region of said gas so as to accelerate said free electrons, said electric field being configured so that so that (i) within a first region of said gas, said free electrons have mean energy equal to or greater than the excitation energy required to form the excimer and (ii) within at least one region of the gas, said free electrons have mean energy less than the ionization energy of the gas, whereby said free electrons excite the gas and form excimers without causing arcing.
Dependencies are inferred from the claim text.