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US 6,399,022 B1Granted
Simplified ozonator for a semiconductor wafer cleaner
AssigneeFairchild Semiconductor Corporation
InventorsMalcolm R. Schuler, Rodney S. Ridley, Thomas E. Grebs
Life of this patent
Estimating the term…
Abstract
The invention provides water enriched with ozone by generating ozone from oxygen using short-wavelength ultraviolet light and pumping the generated ozone under pressure through a 0.1-micron filter into a sealed housing of deionized water. The filter is fabricated of a material such as polytetrafluoroethylene which does not react with water and ozone. The filter apertures are sufficiently small to prevent the formation of gas bubbles in the outlet fluid. The highly-purified outlet fluid is usable immediately in semiconductor wafer cleaning.
Claims28
An apparatus for generating ozonated water comprising:
- a first container sealed from ambient atmosphere for holding fluid and having first and second inlets;
- a first inlet to the first container for receiving ozone;
- a second inlet to the first container for receiving deionized water;
- an ozone dispersion filter connected to the first inlet and disposed in a second container sealed from ambient atmosphere for dissolving ozone into the water in the first container;
- an outlet connected to the second container for removing ozonated water from the second container.
2 more elements
An apparatus for generated ozonated water comprising:
- a first container sealed from the atmosphere for holding gases;
- an ultraviolet lamp mounted in the first container;
- an electrical power source outside the first container and connected to the ultraviolet lamp;
- an inlet to the first container for receiving oxygen;
- an outlet from the first container for removing ozone;
- a check valve connected to the outlet from the first container for preventing the flow of ozone back into the first container;
- a second container sealed from the atmosphere for holding fluid and having first and second inlets;
- a first inlet to the second container connected to the check valve for receiving ozone;
- a second inlet to the second container for receiving deionized water;
- an ozone dispersion filter connected the first inlet and disposed in the second sealed container for dissolving ozone into the water in the second container;
- an outlet connected to the second container for removing ozonated water from the second container.
8 more elements
A method for generating ozonated water comprising the steps of:
- delivering oxygen into a first container;
- exposing the oxygen to ultraviolet light, thereby converting the oxygen to ozone;
- delivering the ozone out of the first container;
- delivering deionized water into a second container sealed from ambient atmosphere;
- delivering the ozone into a filter in the second container at a pressure greater than the pressure of the water for dissolving the ozone into the water;
- withdrawing ozonated water from the second container through a restricted orifice in order to maintain the pressure in the housing so as to dissolve the ozone into the water in a proportion equal to or greater than 7 parts per million.
3 more elements
A method for generating ozonated water comprising the steps of:
- pumping deionized water into a container sealed from ambient atmosphere;
- pumping ozone into a filter in the container at a pressure greater than the pressure of the water;
- withdrawing ozonated water from the container through a restricted orifice in order to maintain the pressure in the housing so as to dissolve the ozone into the water in a proportion equal to or greater than 7 parts per million.
An apparatus for dissolving ozone in water comprising:
- a mixing container for holding water under pressure and having first and second inlets;
- the first inlet for receiving ozone and the second inlet for receiving deionized water;
- an ozone dispersion filter connected to the first inlet and having openings small enough to pass ozone into the mixing container and to prevent passage of water from the mixing container into the first inlet in order to dissolve ozone into the deionized water in the mixing container;
- an outlet connected to the mixing container for removing ozonated water from the mixing container, said outlet being smaller in size than the second inlet in order to maintain a back pressure on the contents of the mixing container.
1 more element
An apparatus for generating ozonated water comprising:
- a mixing container for holding fluid under pressure and having first and second inlets;
- the first inlet to the mixing container for receiving ozone and the second inlet to the mixing for receiving deionized water;
- an ozone dispersion filter connected to the first inlet and having openings small enough for passing ozone into the mixing container and for preventing water from passing into the first inlet in order to dissolve ozone into the deionized water in the mixing container;
- a variable size outlet connected to the mixing container for removing ozonated water from the first container and adjustable to maintain a back pressure on the mixing container.
1 more element
A method for generating ozonated water comprising the steps of:
- delivering oxygen into a first container;
- exposing the oxygen to ultraviolet light, thereby converting the oxygen to ozone;
- delivering the ozone out of the first container;
- delivering deionized water into a mixing container;
- delivering the ozone into a filter in the second container for dissolving the ozone into the water;
- withdrawing ozonated water from the second container through a restricted orifice in order to maintain the pressure in the mixing container in order to dissolve the ozone into the water.
3 more elements
Dependencies are inferred from the claim text.