Multilayer films with sharp, stable interfaces for use in EUV and soft X-ray application
AssigneeThe Regents of the University of California
InventorsTroy W. Barbee, Jr., Sasa Bajt
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Abstract
The reflectivity and thermal stability of Mo/Si (molybdenum/silicon) multilayer films, used in soft x-ray and extreme ultraviolet region, is enhanced by deposition of a thin layer of boron carbide (e.g., B4C) between alternating layers of Mo and Si. The invention is useful for reflective coatings for soft X-ray and extreme ultraviolet optics, multilayer for masks, coatings for other wavelengths and multilayers for masks that are more thermally stable than pure Mo/Si multilayers
Claims20
An EUVL multilayer structure, comprising:
- alternating layers of an absorber layer and a spacer layer;
- and
- an interface layer placed between each absorber layer and each spacer layer, wherein said interface layer comprises a material that controls interfacial reactions between said absorber layer and said spacer layer subsequent to fabrication of said multilayer, wherein said material is selected from the group consisting of boron carbide and carbon with boron based compounds.
A method of making an EUVL multilayer structure, comprising:
- providing alternating layers of an absorber layer and a spacer layer;
- and
- placing an interface layer between each such absorber layer and each such spacer layer, wherein said interface layer comprises a material that controls interdiffusion between said absorber layer and said spacer layer, wherein said material is selected from the group consisting of boron carbide and carbon with boron based compounds.
An EUVL multilayer structure, comprising:
- alternating layers of an absorber layer and a spacer layer;
- and
- a non-hydrogenated interface layer placed between each absorber layer and each spacer layer, wherein said interface layer comprises a material that controls interfacial reactions between said absorber layer and said spacer layer subsequent to fabrication of said multilayer.
Dependencies are inferred from the claim text.