System for reclaiming process water

A system for reclaiming process water from a cooling tower exhaust from a semiconductor fabrication plant comprising:

• a semiconductor fabrication plant,
• a source of general exhaust gas from rooms within said semiconductor fabrication plant,
• scrubber exhaust gas from semiconductor fabrication systems within said rooms of said semiconductor fabrication plant,
• a heat exchanger equipped with cooling elements, a gas inlet and a gas outlet,
• a flow of exhaust gas having a temperature not higher than 24° C. for passing through cavities in said cooling elements, wherein said flow of exhaust gas being composed of said general exhaust gas and said scrubber exhaust gas,
• a cooling tower for producing an effluent gas containing at least 80% relative humidity, a conduit for feeding said effluent gas to said gas inlet of said heat exchanger and for passing over said cooling elements and exiting through said gas outlet, and
• a water collecting means for collecting water condensed on said cooling elements.