Apparatus, method and system of liquid-based, wide range, fast response temperature control of electronic device

An apparatus for controlling a temperature of a semiconductor device, the apparatus comprising:

• a heater, adapted to be thermally coupled to the semiconductor device;
• a heat sink thermally coupled to the heater, wherein the heat sink defines a chamber and the chamber is adapted to have a liquid flowing through the chamber;
• and
• a temperature control system, coupled to both the heater and the heat sink, for controlling a temperature of a point on either the heater or the semiconductor device;
• wherein the temperature control system is adapted to move the temperature of the point on the heater or the device from approximately a first set point temperature to approximately a second set point temperature by changing the control of the heater and maintaining at a substantially constant temperature the liquid flowing into the chamber, the liquid having an operative temperature range that extends as low as approximately −40 degrees C., and the operative set point temperatures extending as low as approximately −10 degrees C.