Strain free planar optical waveguides
AssigneeAgere Systems Optoelectronics Guardian Corp.
InventorEphraim Suhir
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Abstract
The present invention is directed to a planar optical waveguide comprising a waveguide core layer interposed between upper and lower cladding layers, characterized in that a so-called “effective” coefficient of thermal expansion of the layer containing the waveguide core is approximately the same as that of the substrate supporting the optical waveguide.
Claims20
A planar optical waveguide comprising upper and lower cladding layers on a substrate having at least one waveguide core formed between said upper and lower cladding layers with said waveguide core and a portion of said upper cladding layer constituting a waveguide core layer, wherein the improvement comprises said waveguide core layer having an effective coefficient of thermal expansion substantially close or equal to the coefficient of thermal expansion of said substrate.
A process for fabricating a planar optical waveguide comprising the steps of forming upper and lower cladding layers on a substrate, forming at least one waveguide core between sail upper and lower cladding layers with said waveguide core and a portion of said upper cladding layer constituting a waveguide core layer, and adjusting the effective coefficient of thermal expansion of said waveguide core layer to be substantially close or equal to the coefficient of thermal expansion of said substrate.
Dependencies are inferred from the claim text.