Fluid-encapsulated MEMS optical switch
AssigneeCorning Incorporated
InventorsVictoria Ann Edwards, Bernard Eid, Christopher Philip Brophy, Darol Chamberlain
Life of this patent
Estimating the term…
Abstract
A fluid encapsulated MEMS optical switch includes an optical waveguide matrix with MEMS mirrors situated in trenches located at waveguide cross-points. The trenches are filled with collimation-maintaining fluid and the mirrors are immersed the rein. The collimation maintaining fluid prevents the light beam from spreading when it enters the switch cross-points. This feature enables the use of much smaller MEMS mirrors and prevents some of the typical MEMS mirror problems found in the related art
Claims23
An optical device for directing a light signal, said optical device comprising:
- a first light propagation path;
- a second light propagation path intersecting said first light propagation path to form a cross-point;
- a micromirror movable between a through-state outside of said cross-point and a reflecting-state in said cross-point;
- and
- a baffle-member positioned adjacent said micromirror to inhibit spurious reflections in said through-state.
An optical device for directing a light signal, said optical device comprising:
- a first waveguide;
- a second waveguide intersecting said first waveguide to form a cross-point;
- a trench intersecting said cross-point;
- a micromirror disposed in said trench and movable between a through-state outside of said cross-point and a reflecting-state at said cross-point;
- and
- a blocking material disposed on a portion of a sidewall of said trench to inhibit spurious reflections in said through-state.
Dependencies are inferred from the claim text.