X-ray array detector
AssigneeJordan Valley Applied Radiation Ltd.
InventorsIsaac Mazor, Amos Gvirtzman, Boris Yokhin, Ami Dovrat
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Abstract
Apparatus for X-ray analysis of a sample includes an X-ray source, which irradiates the sample, and an X-ray detector device, which receives X-rays from the sample responsive to the irradiation. The device includes an array of radiation-sensitive detectors, which generate electrical signals responsive to radiation photons incident thereon. Processing circuitry of the device includes a plurality of signal processing channels, each coupled to process the signals from a respective one of the detectors so as to generate an output dependent upon a rate of incidence of the photons on the respective detector and upon a distribution of the energy of the incident photons.
Claims29
Apparatus for X-ray analysis of a sample, comprising:
- an X-ray source, which irradiates the sample;
- and
- an X-ray detector device, which receives X-rays from the sample responsive to the irradiation, the device comprising:
- an array of radiation-sensitive detectors, which generate electrical signals responsive to radiation photons incident thereon;
- and
- processing circuitry comprising a plurality of signal processing channels, each coupled to process the signals from a respective one of the detectors so as to generate an output dependent upon a rate of incidence of the photons on the respective detector and upon a distribution of the energy of the incident photons.
A method for X-ray analysis of a sample, comprising:
- irradiating the sample with X-rays;
- receiving X-rays from the sample, responsive to the irradiation, at an array of detectors in respective, predetermined locations, which detectors generate electrical signals responsive to X-ray photons incident thereon;
- and
- processing the signals from the array of detectors in respective processing channels, so as to generate an output indicative of a rate of arrival of the photons incident at the respective locations and dependent upon a distribution of the energy of the incident photons.
Radiation detection apparatus, comprising:
- an array of radiation-sensitive detectors, which generate electrical signals responsive to radiation photons incident thereon;
- and
- processing circuitry comprising:
- a plurality of signal processing channels, each channel coupled to process the signals from a respective one of the detectors and comprising a counter, which counts the number of photons incident on the respective detector, wherein each of the channels comprises an integrated circuit disposed on a common substrate with the respective detector;
- and
- a bus common to a multiplicity of the channels, which receives and outputs respective photon counts from the channels in turn.
Dependencies are inferred from the claim text.