Parallel x-ray nanotomography
AssigneeJMAR Research, Inc.
InventorsZachary H. Levine, I. C. Edmond Turcu
Life of this patent
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Abstract
A parallel nanotomography imaging system is provided having an x-ray source, which is preferably a laser-based x-ray source that generates x-rays that are collected using a collector optic and are received in a composite objective assembly. The composite objective assembly includes plural micro-objectives, each imaging the target. The x-ray image is received by an x-ray image formation and acquisition apparatus, and processed and/or displayed.
Claims32
A tomography imaging system comprising a composite objective lens assembly comprising a plurality of micro-objectives, each of the micro-objectives structured to block zero-order diffracted radiation.
A tomography imaging system comprising:
- a radiation source emitting light in a desired wavelength;
- a collector optic positioned to collect said light and transmit or reflect it;
- a sample holder positioning a sample to be imaged in the path of said light from said collector optic;
- a composite objective lens system including an array of micro-objectives imaging said light in a desired fashion, each of the micro-objectives structured to block zero-order diffracted radiation;
- and
- an imager.
A method of forming an image of a sample comprising the steps of:
- providing x-rays;
- exposing said sample to said x-rays;
- and
- imaging said x-rays downstream of said sample using a composite objective lens comprising a plurality of micro-objectives, each of the micro-objectives being structured to block zero-order diffraction x-rays.
A method of forming an image of a sample comprising the steps of:
- providing x-rays;
- collecting said x-rays and directing them in a desired fashion;
- positioning the sample in the path of said rays;
- imaging said x-rays downstream of said sample using a composite objective lens comprising a plurality of micro-objectives, each of the micro-objectives being structured to block zero-order diffraction x-rays;
- and
- detecting and acquiring an image using said imaged x-rays.
Dependencies are inferred from the claim text.