Detector with frequency converting coating

A molecular fluorine laser system, comprising:

• a gain medium comprising a gas mixture including fluorine and a buffer gas for generating ultraviolet radiation having a wavelength around 157 nm;
• a discharge unit and a high voltage power supply for supplying energy to the gain medium;
• a resonator including a wavelength selection unit for generating an output beam;
• a detector for measuring a parameter of the output beam including a light sensitive element and a frequency conversion coating for absorbing incident 157 nm light and re-emitting light having a wavelength longer than 240 nm in a direction toward said light sensitive element, such that a dark current background, known to grow rapidly when light sensitive elements are uses without protective frequency conversion coatings, is suppressed permitting the detector to have a lifetime of more than one billion laser pulses;
• a processor for receiving data from said detector and adjusting one or more components of said system in a feedback loop;
• and
• wherein said processor receives data from said detector relating to at least one parameter selected from the group consisting of energy and wavelength and adjusts said parameter by communicating with at least one of said discharge unit, high voltage power supply and said wavelength selection unit, respectively, in a feedback loop.

An argon fluoride laser system, comprising:

• a gain medium for generating ultraviolet radiation having a wavelength around 193 nm;
• a discharge circuit including a power supply for providing energy to said gain medium;
• a resonator including the gain medium and a wavelength selection unit for generating a narrowed laser beam;
• a detector for measuring a parameter of said beam, said detector including light sensitive element and a frequency conversion coating formed on said light sensitive element for absorbing incident 193 nm ultraviolet light and re-emitting longer wavelength light having a wavelength greater than 240 nm in a direction toward said light sensitive element, thereby suppressing a growth rate of a dark current background and allowing the detector to have a lifetime of more than one billion laser pulses;
• and
• a processor for receiving data from said detector relating to an energy of the beam and controls said energy by communicating with said discharge circuit in feedback loop.

An argon fluoride laser system, comprising:

• a gain medium for generating ultraviolet radiation having a wavelength around 193 nm;
• a discharge circuit including a power supply for providing energy to said gain medium;
• a resonator including the gain medium for generating a laser beam;
• a detector for measuring a parameter of said beam, said detector;
• including light sensitive element and a frequency conversion coating formed on said light sensitive element for absorbing incident 193 nm ultraviolet light and re-emitting longer wavelength light having a wavelength greater than 240 nm in a direction toward said light sensitive element, thereby suppressing a growth rate of a dark current background and allowing the detector to have a lifetime of more than one billion laser pulses;
• a processor for receiving data from said detector and adjusting one or more components of said system in a feedback loop;
• and
• a wavelength selection unit for selecting and stabilizing a wavelength of an output emission beam of said laser system, wherein said processor receives data from said detector and adjusts said wavelength by communicating with said wavelength selection unit in a feedback loop.

A molecular fluorine laser system, comprising:

• a gain medium for generating ultraviolet radiation having a wavelength around 157 nm;
• a discharge circuit including a power supply for providing energy to said gain medium;
• a resonator including the gain medium for generating a laser beam;
• and
• a detector for measuring a parameter of said beam, said detector including light sensitive element and a frequency conversion coating formed on said light sensitive element for absorbing incident 157 nm ultraviolet light and re-emitting longer wavelength light having a wavelength greater than 240 nm in a direction toward said light sensitive element, thereby suppressing a growth rate of a dark current background and allowing the detector to have a lifetime of more than one billion laser pulses;
• and
• a processor for receiving data from said detector relating to an energy of the beam and controls said energy by communication with said discharge circuit in a feedback loop.

A molecular fluorine laser system, comprising:

• a gain medium for generating ultraviolet radiation having a wavelength around 157 nm;
• a discharge circuit including a power supply for providing energy to said gain medium;
• a resonator including the gain medium for generating a laser beam;
• a detector for measuring a parameter of said beam, said detector including light sensitive element and a frequency conversion coating formed on said light sensitive element for absorbing incident 157 nm ultraviolet light and re-emitting longer wavelength light having a wavelength greater than 240 nm in a direction toward said light sensitive element, thereby suppressing a growth rate of a dark current background and allowing the detector to have a lifetime of more than one billion laser pulses;
• a processor for receiving data from said detector and adjusting one or more components of said system in a feedback loop;
• and
• a wavelength selection unit for selecting and stabilizing a wavelength of an output emission beam of said laser system, wherein said processor receives data from said detector and adjusts said wavelength by communicating with said wavelength selection unit in a feedback loop.