Confocal microscopic equipment
AssigneeYokogawa Electric Corporation
InventorTakeo Tanaami
Life of this patent
Estimating the term…
Abstract
A confocal microscopic equipment for measuring the solid shape of a sample at high speeds, and which does not require scanning of an irradiating light beam, wherein are provided a light source, apertures on which the output beam from the light source is irradited, an objective lens that forms stationary images of the apertures on the sample and collects the reflected or fluorescent light from the sample, a photo detector, and a beam splitter that makes the beam that has passed through the apertures incident to the objective lens by means of transmission or reflection and focuses the output beam from the objective lens on the photo detector by reflection or transmission.
Claims8
A confocal microscopic equipment for measuring solid shape of a sample, said equipment comprising:
- an illuminating light source;
- a slit array forming a plurality of apertures disposed in front of and in a position of an iris of said light source to guide an output beam from said light source containing an image of said plurality of apertures;
- a sample position means;
- first lens means for passing said image of said plurality of apertures and for forming said image on said sample position;
- second lens means for transmitting light or fluorescence of said image on said sample position means;
- and
- photo detector means for detecting said light or fluorescence from said sample position means as defined by said image of said plurality of apertures.
Dependencies are inferred from the claim text.