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US 6,388,632 B1Granted
Slot antenna used for plasma surface processing apparatus
AssigneeRohm Co., Ltd.
InventorsShigehiro Murakawa, Kenji Tanaka, Takahiro Arakawa
Life of this patent
Estimating the term…
Abstract
A slot antenna includes an antenna guide formed with a recess, a dielectric member received in the recess, a slot plate held in contact with the dielectric member; and a waveguide connected to the antenna guide for introduction of microwaves. The slot plate is uniformly supported by the dielectric member. Alternatively, the slot plate is provided with an expansion absorbing region, so that the slot plate is displaceable relative to the dielectric member.
Claims16
A slot antenna for plasma surface process comprising:
- a metal antenna guide formed with a recess;
- a dielectric member received in the recess;
- a metal slot plate held in contact with the dielectric member, the slot plate being provided with a plurality of slots;
- a waveguide connected to the antenna guide for introduction of microwaves;
- and
- a protective coating formed on the slot plate in contact therewith, the protective coating extending into the slots.
3 more elements
A slot antenna for plasma surface process comprising:
- a metal antenna guide formed with a recess;
- a dielectric member made of a dielectric material and received in the recess;
- a metal slot plate provided with a plurality of slots;
- and
- a waveguide connected to the antenna guide for introduction of microwaves;
- wherein at least part of the slot plate is embedded in the dielectric member, the slot plate having a first surface and a second surface opposite to the first surface, both of the first and second surfaces of the slot plate being held in contact with the dielectric member, the dielectric material of the dielectric member filling the slots.
3 more elements
A slot antenna for plasma surface process comprising:
- a metal antenna guide formed with a recess;
- a first dielectric member received in the recess;
- a metal slot plate having a first surface held in contact with the first dielectric member, the slot plate also having a second surface opposite to the first surface, the slot plate being provided with a plurality of slots;
- a second dielectric member held in contact with the second surface of the slot plate;
- and
- a waveguide connected to the antenna guide for introduction of microwaves.
3 more elements
A slot antenna for plasma surface process comprising:
- a metal antenna guide formed with a recess;
- a dielectric member received in the recess and provided with a central through-hole;
- a conductive slot layer formed on the dielectric member, the slot layer being provided with a plurality of slots, the slot layer having an annular portion extending into the central through-hole of the dielectric member;
- and
- a waveguide connected to the antenna guide for introduction of microwaves, the waveguide having a conductive shaft inserted into the central through-hole of the dielectric member, in contact with the annular portion of the slot layer.
2 more elements
A slot antenna for plasma surface process comprising:
- a metal antenna guide formed with a recess;
- a dielectric member received in the recess and provided with a central through-hole;
- a conductive slot layer formed on the dielectric member, the slot layer being provided with a plurality of slots, the slot layer having an annular portion extending into the central through-hole of the dielectric member;
- a waveguide connected to the antenna guide for introduction of microwaves, the waveguide having a conductive shaft oriented toward the central through-hole of the dielectric member,
- a conductive fixing piece inserted into the central through-hole of the dielectric member in contact with the annular portion of the slot layer and connected to the conductive shaft.
2 more elements
A slot antenna for plasma surface process comprising:
- a metal antenna guide formed with a recess;
- a dielectric member received in the recess;
- a metal slot plate held in contact with the dielectric member;
- and
- a waveguide connected to the antenna guide for introduction of microwaves;
- wherein the slot plate is divided by an annular row of openings into an inner portion and an outer portion, the inner portion of the slot plate being provided with a plurality of slots, each of which is smaller in size than each of said openings, the outer portion of the slot plate being fixed to the antenna guide.
3 more elements
A slot antenna for plasma surface process comprising:
- a metal antenna guide formed with a recess;
- a dielectric member received in the recess;
- a metal slot plate held in contact with the dielectric member, the slot plate having a central portion provided with a plurality of slots, the slot plate also having a peripheral portion provided with a plurality of through-holes;
- a waveguide connected to the antenna guide for introduction of microwaves;
- and
- a plurality of bolts loosely extending through the through-holes of the slot plate for attaching the peripheral portion of the slot plate to the antenna guide.
3 more elements
Dependencies are inferred from the claim text.