Constricted glow discharge plasma source
AssigneeThe Regents of the University of California
InventorAndre Anders
Life of this patent
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Abstract
A miniaturized construction and slit end orifice configurations of a constricted glow discharge chamber and method are disclosed. The polarity and geometry of the constricted glow discharge plasma source is set so that the contamination and energy of the ions discharged from the source are minimized. The several sources can be mounted in parallel and in series to provide a sustained ultra low source of ions in a homogeneous linear plasma stream with contamination below practical detection limits. Other configuration include a hollow chamber with an anode outside the chamber located opposite its discharge constriction orifice. The constriction orifice may be circular or a slit and can be aligned to form a linear array for processing web substrates.
Claims8
A low energy plasma source to generate and deliver plasma to a substrate with said substrate being at a neutral potential, said low energy plasma source comprising:
- a cathode disposed to be connected to a negative terminal of a DC voltage potential source;
- an anode disposed to be connected to a positive terminal of said DC voltage potential source that is at said neutral potential of said substrate;
- said cathode being spaced apart from said anode and electrically insulated from said anode with a dielectric material, a hollow enclosure formed therewithin;
- a gas inlet tube extending into said hollow enclosure and disposed to be connected to a feed gas source external to said hollow enclosure;
- and
- an insulating barrier within said hollow enclosure adjacent said anode with a shaped and sized gas discharge constriction passage therethrough;
- said anode defining a passage therethrough and aligned with said gas discharge constriction passage of said insulating barrier with said passage defined by said anode having a complementary shape and sized at least as large as said gas discharge constriction passage through said insulation barrier.
A method for generating and delivering a low energy plasma stream to a substrate with said substrate being at a neutral potential, said method comprising the steps of:
- a. forming an hollow enclosure by spacing a cathode apart from an anode and electrically insulating one from the other;
- b. providing a feed gas to said hollow enclosure;
- c. constricting a gas discharge from said hollow enclosure with a sized and shaped gas discharge constriction passage through an insulting barrier adjacent said anode within said hollow enclosure;
- d. aligning a passage through said anode with said gas discharge constriction passage, said anode passage having a shape that is complementary to, and that is at least as large as said gas discharge constricted passage;
- and
- e. from a DC potential source, applying a negative DC voltage potential to said cathode and a positive DC voltage potential to said anode with said positive DC potential that is at said neutral potential of said substrate.
Dependencies are inferred from the claim text.