Integrated circuit package formed at a wafer level
AssigneeAtmel Corporation
InventorKen M. Lam
Life of this patent
Estimating the term…
Abstract
An integrated circuit package that is formed at the wafer level. The integrated circuit package occupies a minimum amount of space on an end-use printed circuit board. A pre-fabricated interposer substrate, made of metal circuitry and a dielectric base, has a plurality of metallized openings which are aligned with metallized wirebond pads on the top surface of a silicon wafer. Solder, or conductive adhesive, is deposited through the metallized openings to form the electrical connection between the circuitry on the interposer layer and the circuitry on the wafer. Solder balls are then placed on the metal pad openings on the interposer substrate and are reflowed to form a wafer-level BGA structure. The wafer-level BGA structure is then cut into individual BGA chip packages.
Claims8
An integrated circuit package formed at a wafer level, comprising:
- a silicon die having an area and having a plurality of bonding pads arranged on a first surface,
- an adhesive layer covering a substantial portion of the first surface of the die, the plurality of bonding pads remaining exposed,
- an interposer substrate disposed on the adhesive layer and including a plurality of metallized openings, said metallized openings forming a plurality of metallized vias, the vias being aligned with the plurality of bonding pads of the die, said interposer substrate further including a plurality of metal circuit traces for interconnecting the plurality of metallized vias, said circuit trace being recessed within the substrate,
- means for electrically connecting the plurality of metallized vias of the interposer substrate and the plurality of bonding pads on the die, and
- a plurality of I/O interconnects formed on the plurality of metallized openings of the interposer substrate to form a connection to the recessed metal traces.
An integrated circuit package formed at a wafer level, comprising:
- a silicon die having an area and having a plurality of bonding pads arranged on a first surface,
- an adhesive layer covering a substantial portion of the first surface of the die, the plurality of bonding pads remaining exposed,
- an interposer substrate composed of a dielectric material having a plurality of recessed metal circuit traces disposed throughout, the interposer substrate being disposed on the adhesive layer and including a plurality of metallized openings forming a plurality of metallized vias which are aligned with the plurality of bonding pads of the die, said openings having a strip of copper across the opening, said vias being interconnected by said metal circuit traces, the interposer substrate having an area of a same size as the area of the die,
- a plurality of metallurgical electrical connections formed between the plurality of solder-filled vias of the interposer substrate and the plurality of bonding pads on the die, and
- a plurality of solder balls formed on the plurality of metallized openings of the interposer substrate to form a connection to the recessed metal traces.
An integrated circuit package formed at a wafer level, comprising:
- a silicon die having an area and having a plurality of bonding pads arranged on a first surface,
- an adhesive layer covering a substantial portion of the first surface of the die, the plurality of bonding pads remaining exposed,
- an interposer substrate disposed on the adhesive layer and including a plurality of metal circuit traces and a plurality of metallized openings forming a plurality of metallized vias, the vias being aligned with the plurality of bonding pads of the die, and being filled with a conductive adhesive to form a plurality of electrical connections between the plurality of metallized openings of the interposer substrate and the plurality of bonding pads on the die, and
- a plurality of I/O interconnects formed on the plurality of metallized openings of the interposer substrate.
Dependencies are inferred from the claim text.