Semiconducting YBCO device and superconducting YBCO device locally converted by AFM tip and manufacturing methods therefor
AssigneeSamsung Electronics Co., Ltd.
InventorsByong-man Kim, Insang Song
Life of this patent
Estimating the term…
Loading patent…
AssigneeSamsung Electronics Co., Ltd.
InventorsByong-man Kim, Insang Song
Estimating the term…
A semiconducting yttrium-barium-copper-oxygen(YBCO) device which locally converts a semiconducting YBCO film to a nonconducting YBCO film by a conductive atomic force microscope (AFM), a superconducting YBCO device which locally converts a superconducting YBCO film to nonsuperconducting YBCO by an AFM, and manufacturing methods thereof are provided. According to a method of manufacturing a semiconducting YBCO device or a superconducting YBCO device locally converted by an AFM tip, a voltage is applied to the local region of a semiconducting YBCO channel or a superconducting YBCO channel by an AFM tip. This can produce a nonconducting YBCO region or nonsuperconducting YBCO region to thereby manufacture a tunnel junction easily without any patterning process by microfabrication including photolithography and dry/wet etching.
A semiconducting yttrium-barium-copper-oxygen (YBCO) device locally converted by an atomic force microscope (AFM), the device comprising:
A method of manufacturing a semiconducting yttrium-barium-copper-oxygen (YBCO) device locally converted by an atomic force microscope (AFM), the method comprising the steps of:
A superconducting yttrium-barium-copper-oxygen (YBCO) device locally converted by an atomic force microscope (AFM), the device comprising:
A method of manufacturing a superconducting yttrium-barium-copper-oxygen (YBCO) device locally converted by an atomic force microscope (AFM), the method comprising the steps of:
Dependencies are inferred from the claim text.