Method for distinguishing a specific region in a sample to be observed by a microscope
AssigneeMosel Vitelic, Inc.
InventorsWen-Tung Chang, Jui-Yen Huang
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Abstract
A method for distinguishing a specific region in a sample to be observed by a microscope is disclosed. The method includes the steps of (a) forming a first concavity on a first side of the specific region by a focus ion beam (FIB) technique, (b) forming a second concavity on a second side of the specific region opposite to the first side by the focus ion beam technique, and (c) filling the first concavity and the second concavity with a first metallic packing and a second metallic packing respectively for defining the specific region to be observed.
Claims14
A method for distinguishing a specific region in a sample to be observed by a microscope, comprising steps of:
- (a) forming a first concavity on a first side of said specific region by a focus ion beam (FIB) technique;
- (b) forming a second concavity on a second side of said specific region opposite to said first side by said focus ion beam technique;
- and
- (c) filling said first concavity and said second concavity with a first metallic packing and a second metallic packing respectively for defining said specific region to be observed.
Dependencies are inferred from the claim text.