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US 6,388,198 B1Granted
Coaxial wiring within SOI semiconductor, PCB to system for high speed operation and signal quality
AssigneeInternational Business Machines Corporation
InventorsClaude Louis Bertin, Gordon Arthur Kelley, Dennis Arthur Schmidt, William Robert Tonti, Jerzy Maria Zalesinski
Life of this patent
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Abstract
An integrated circuit that contains a coaxial signal line formed at least partially within a silicon-containing substrate. The coaxial signal line comprises an inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor along said length. A method of preparing such an integrated circuit having said coaxial signal line formed at least partially within a silicon-containing substrate is also disclosed herein.
Claims13
An integrated circuit comprising:
- a silicon-containing substrate having a trench region formed therein;
- and
- a coaxial signal line formed at least partially within said silicon-containing substrate, said coaxial signal line comprising an inner conductor present in said trench region, said inner conductor having a length, said length axially surrounded by, and insulated from, an outer conductor present above said trench region and said inner conductor along said length.
Dependencies are inferred from the claim text.