Method and apparatus for lapping or polishing semiconductor silicon single crystal wafer
AssigneeShin-Etsu Handotai Co., Ltd.
InventorKohei Toyama
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Abstract
A method and apparatus for lapping or polishing a semiconductor silicon single crystal wafer is provided for eliminating the transfer of waviness of a wafer cut by a wire saw apparatus, improving the quality of the wafer, realizing automated lapping or polishing processes, allowing for single crystal processing from a cassette to another cassette, and increasing the workability and labor productivity. A small amount “e” of single-side lapping or single-side polishing is repeated alternately on the two sides “A” and “B” of a semiconductor silicon single crystal wafer “W” to get to a predetermined total lapping or polishing stock removal.
Claims2
A method of lapping a semiconductor silicon single crystal wafer to form a reference surface, wherein a small amount of single-side lapping in a range of from 10 to 20 μm is repeated and divided alternately between opposite surfaces of a semiconductor silicon single crystal wafer until obtaining a total amount of lapping stock removal and until the wafer is free from waviness.
A method of polishing a semiconductor silicon single crystal wafer to form a reference surface, wherein a small amount of single-side polishing in a range of from 1 to 3 μm is repeated and divided alternately between opposite surfaces of a semiconductor silicon single crystal wafer until obtaining a total amount of polishing stock removal and until the wafer is free from waviness.
Dependencies are inferred from the claim text.