US 6,387,725 B1 · Production method for integrated angular speed sensor device

Abstract

An angular speed sensor comprises a pair of mobile masses which are formed in an epitaxial layer and are anchored to one another and to the remainder of the device by anchorage elements. The mobile masses are symmetrical with one another, and have first mobile excitation electrodes which are intercalated with respective first fixed excitation electrodes and second mobile detection electrodes which are intercalated with second fixed detection electrodes. The first mobile and fixed excitation electrodes extend in a first direction and the second mobile and fixed detection electrodes extend in a second direction which is perpendicular to the first direction and is disposed on a single plane parallel to the surface of the device.

Claims10

Dependent claims

A method for production of an integrated angular speed sensor device, comprising:

forming a sacrificial region on a substrate of semiconductor material;
growing a pseudo-epitaxial layer including a polycrystalline epitaxial region in contact with the sacrificial region and a monocrystalline epitaxial region in contact with the substrate;
forming electronic elements in the monocrystalline epitaxial region;
removing selective portions of the polycrystalline epitaxial region thereby forming excitation electrodes that are intercalated with fixed excitation electrodes that extend in a first direction of extension;
forming mobile detection electrodes that are intercalated with fixed detection electrodes that extend in a second direction of extension which is substantially perpendicular to the first direction;
and forming a trench separating from one another the mobile and fixed excitation and detection electrodes;
and
removing the sacrificial region through the trench.

5 more elements

A method for production of an integrated angular speed sensor device, the method comprising:

forming a mobile structure flexibly anchored to a semiconductor body, the mobile structure including mobile excitation electrodes and mobile detection electrodes;
forming on the semiconductor body fixed excitation electrodes alternating with the mobile excitation electrodes, the mobile and fixed excitation electrodes having a first direction of extension;
forming on the semiconductor body fixed detection electrodes alternating with the mobile detection electrodes, the mobile and fixed detection electrodes having a second direction of extension at an angle to the first direction, the mobile and fixed excitation and detection electrodes all being in the plane of the surface;
and
forming in the semiconductor body, prior to forming the mobile and fixed excitation and detection electrodes, a buried contact region that is doped to provide a conductive path, wherein one of the fixed excitation and detection electrodes is formed in connection with the buried contact region.

2 more elements

Dependencies are inferred from the claim text.

Production method for integrated angular speed sensor device

Life of this patent

Production method for integrated angular speed sensor device

Life of this patent

Abstract

Claims10