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AssigneeCanon Kabushiki Kaisha
InventorTsutomu Abe
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A method for manufacturing an ink jet recording head, which is provided with a ceiling plate having grooves of locally different depth to form ink paths arranged for each of discharge ports; and a substrate having discharge energy generating elements each arranged on a part of each of the paths, and which is structured by bonding the ceiling plate and the substrate together, comprises the steps of performing a first laser processing to process grooves of first depth by irradiating laser beam through a first mask pattern corresponding to the ink path pattern of the ceiling plate; and performing a second laser processing to form a region of locally different depth in each of the grooves by irradiating laser beam through a second mask pattern having the reduced beam pattern to be locally open on the exposure region of the first mask pattern corresponding to the grooves each having the first depth. With the method thus structured, the processing is performed up to the first depth without reducing beam. Then, it is made possible to execute processing steps in good precision without being affected by the carbon produced in the process of the adjacent nozzles.
A method for manufacturing an ink jet recording head including a ceiling plate having grooves that form ink paths arranged corresponding to each of plural discharge ports, and a substrate having discharge energy generating elements each arranged on a part of each of the ink paths, and structured by bonding the ceiling plate and the substrate, comprising the following steps of:
Dependencies are inferred from the claim text.