Structural body and method of producing the same
AssigneeNGK Insulators, Ltd.
InventorsMasao Nishioka, Naotaka Kato
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Abstract
A structural body has an aluminum nitride sintered body, a silicon carbide film formed on a surface of the sintered body, and an intermediate layer generated between the sintered body and the silicon carbide film. The intermediate layer is mainly made of a silicon nitride. Preferably, the intermediate layer includes smaller than 5 wt % of carbon and smaller than 5 wt % of aluminum, and a thickness of the intermediate layer is greater than 0.2 μm.
Claims8
A structural body comprising an aluminum nitride sintered body, a silicon carbide film (a) formed on a surface of said aluminum nitride sintered body and (b) constituting an outermost layer of said structural body, and an intermediate layer generated between said aluminum nitride sintered body and said silicon carbide film, said intermediate layer being mainly made of silicon nitride.
Dependencies are inferred from the claim text.