Method of manufacturing thin-film magnetic head
AssigneeTDK Corporation
InventorYoshitaka Sasaki
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AssigneeTDK Corporation
InventorYoshitaka Sasaki
Estimating the term…
It is an object of a method of manufacturing a thin-film magnetic head of the invention to improve the insulating property between an electrode connected to a magnetoresistive element and a shield layer without increasing the thickness of an insulating layer between the magnetoresistive element and the shield layer. In the method, a pair of conductive layers to be the electrode (lead) connected to the MR element are formed on an insulating layer. Magnetic layers are formed to surround the conductive layers while an insulating film is placed between the magnetic layers and the conductive layers. Next, an insulating layer of alumina, for example, is formed over the entire surfaces of the magnetic layers. This insulating layer is polished to the surfaces of the conductive layers and flattened. Through this flattening process, a structure is obtained in which the magnetic layers are made to be a bottom shield layer, and in grooves thereby made in the bottom shield layer, the conductive layers are formed in a self-aligned manner.
A method of manufacturing a thin-film magnetic head comprising:
Dependencies are inferred from the claim text.