Airborne molecular contaminant removing apparatus

Abstract

A pair of jet nozzles are constructed for vapor-liquid contact removal in a gaseous molecule impurity removal apparatus, with one of the nozzles producing a counter flow to an upstream direction and the other nozzle producing a flow parallel to a downstream flow, the pair of nozzles being so disposed as to be joined together in a counter flow system. The counter flow nozzles are arranged alternatively so that they are not opposite each other. Also, a three stage eliminator structure is provided, and air that has been processed once is fed back to a central eliminator.

Dependencies are inferred from the claim text.