Method of removing moisture in gas supply system

A method of removing moisture remaining in a gas supply system having an inside, comprising the steps of:

• flowing an inert gas to remove moisture remaining on inner surfaces of piping of a gas supply system having an inside, wherein the flow of the inert gas to remove moisture is a viscous flow and a mean free path of the inert gas to remove moisture is smaller than a diameter of the piping of the gas supply system;
• alternately stopping the flow of the inert gas to remove moisture at specific intervals;
• and
• applying a flow pressure of the inert gas to remove moisture inside the gas supply system when the flow of inert gas to remove moisture is stopped by continuously evacuating the inside of the gas supply system to a pressure level between a minimum pressure wherein the gas flow of the inert gas becomes viscous flow and a maximum pressure being a saturated vapor pressure of water at a flow temperature of the inert gas to remove water.

A method of removing moisture remaining in a gas supply system having piping, wherein the method removes moisture without the use of heat and comprises the steps of:

• providing a gas supply system having piping with inner surfaces;
• flowing an inert gas to remove moisture remaining on the inner surfaces of the metal piping of the gas supply system at a flow pressure;
• setting the flow pressure of the inert gas to remove moisture at a flow pressure level not lower than the lowest pressure at which gas flow for the inert gas becomes viscous flow and not higher than a saturated vapor pressure of water at a flow temperature of the inert gas for removing moisture, wherein during viscous flow of the inert gas, a mean free path of the inert gas to remove moisture is smaller than a diameter of the piping of the gas supply system;
• and
• evacuating the inert gas to remove moisture, wherein the evacuation of the inert gas to remove moisture occurs at a first evacuating port for the inert gas to remove moisture of the gas supply system.