Workpiece holder for polishing, method for producing the same, method for polishing workpiece, and polishing apparatus

A method for producing a workpiece holder for polishing having a workpiece holder body provided with multiple perforated holes for holding a workpiece by vacuum adsorption and a holding surface coated with a resin, comprising:

• coating a holding surface of the workpiece holder body with a thermosetting resin;
• preliminarily curing the thermosetting resin around the perforated holes while passing a heated gas through the perforated holes from a back face of the workpiece holder body;
• then curing the remaining thermosetting resin by heating to form a resin coating film;
• and
• subjecting a surface of the resin coating film to correction by lapping and then to correction by polishing on a polishing turn table of a polishing apparatus.

An apparatus for polishing a workpiece, comprising:

• a turning table provided with a polishing pad by adhesion;
• means for feeding a polishing agent to a surface of the polishing pad;
• and
• a workpiece holder for polishing comprising a workpiece holder body provided with multiple perforated holes for holding a workpiece by vacuum adsorption, wherein a holding surface of the holder body is coated with a coating film formed by applying a thermosetting resin having a viscosity of 10,000 cps or higher, which has been degassed by kneading under vacuum, on the holding surface and curing the thermosetting resin by heating, and a surface of the coating film is polished, which forcibly brings a workpiece into contact with the surface of the polishing pad with pressure.