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US 6,386,609 B1Granted
Gripper design to reduce backlash
AssigneeApplied Materials, Inc.
InventorBoris I. Govzman
Life of this patent
Estimating the term…
Abstract
A gripper assembly is provided. The gripper assembly comprises a pair of moving assemblies. In an exemplary embodiment, the moving assemblies comprise a pair of grippers coupled to a pair of gripper fingers that have end effectors adapted to contact a wafer. A magnet is placed in each of the moving assemblies so that the attractive force between the magnets moves a portion of the moving assemblies toward each other.
Claims10
A gripper assembly comprising:
- a pair of moving assemblies;
- and
- a pair of magnets, each coupled to one of the moving assemblies so that the force between the magnets moves a portion of the moving assemblies toward each other when the moving assemblies are closed.
A gripper assembly comprising:
- a pair of moving assemblies comprising
- a pair of grippers;
- a pair of gripper fingers, each coupled to one of the grippers;
- and
- a pair of end effectors, each coupled to one of the gripper fingers;
- and
- a pair of attractive magnets, each coupled to one of the moving assemblies so that the attractive force between the magnets moves a portion of the moving assemblies toward each other when the moving assemblies are closed.
4 more elements
A gripper assembly comprising:
- a pair of moving assemblies;
- and
- a pair of repulsive magnets, each coupled to one of the moving assemblies so that the force between the magnets moves a portion of the moving assemblies away from each other so as to hold a hollow object from inside the object.
A method comprising:
- positioning a pair of moving assemblies;
- and
- attracting the pair of moving assemblies toward each other when the moving assemblies are in a closed position;
- wherein attracting the pair of moving assemblies toward each other when the moving assemblies are in a closed position comprises placing a pair of attractive magnets in the moving assemblies, each attractive magnet coupled to one of the moving assemblies so that the attractive force between the magnets moves a portion of the moving assemblies toward each other when the moving assemblies are closed.
1 more element
A gripper assembly comprising:
- an actuator;
- a pair of opposed grippers operatively coupled to the actuator;
- a pair of gripper fingers, each coupled to one of the grippers;
- and
- a pair of attractive magnets, each coupled to one of the gripper fingers so that the attractive force between the magnets moves the gripper fingers toward each other when the grippers are closed.
2 more elements
Dependencies are inferred from the claim text.