Plate-tilting apparatus
AssigneeMosel Vitelic, Inc.
InventorsSheng-Feng Hung, Hua-Jen Tseng, Chun-Chieh Lee, Yu-Hua Yeh
Life of this patent
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Abstract
A plate-tilting apparatus adapted to be used in a semiconductor-manufacturing process is disclosed. The plate-tilting apparatus is used for preventing thin wafers from being collected in a cassette contacted with each other after the thin wafers are taken out of a solution. It includes a plate having the container locked thereon and having a first edge pivotally connected to a basal plane of a tank used in the semiconductor-manufacturing process, and a plate-lifting device connected to a second edge of the plate opposite to the first edge for lifting the second edge of the plate, so that the plate can be tilted at a specific angle.
Claims19
A plate-tilting apparatus adapted to be used in a semiconductor-manufacturing process comprising:
- a plate having a first edge pivotally connected to a plane surface and a locking member for locking a container thereon;
- and
- a plate-lifting device connected to a second edge of said plate opposite to said first edge for lifting said second edge of said plate, so that said plate can be tilted with a specific angle, wherein said container is a cassette for collecting a plurality of wafers therein.
The plate-tilting apparatus adapted to be used in a semiconductor-manufacturing process for preventing thin sheets collected in a container from clinging together after said thin sheets are out of a solution comprising:
- a plate having a first edge pivotally connected to a basal plane of said container:
- and
- a plate-lifting device connected to a second edge of said plate opposite to said first edge for lifting said second edge of said plate so that said plate can be tilted at a specific angle.
A plate-tilting apparatus adapted to be used in a semiconductor-manufacturing process comprising:
- a plate having a first edge pivotally connected to a plane surface;
- and
- a plate-lifting device connected to a second edge of said plate opposite to said first edge for lifting said second edge of said plate, so that said plate can be tilted with a specific angle, wherein said plane surface is a basal plane of a tank.
Dependencies are inferred from the claim text.