CSP plate holder
AssigneeDisco Corporation
InventorsEiichi Yoshimura, Shinichi Namioka
Life of this patent
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AssigneeDisco Corporation
InventorsEiichi Yoshimura, Shinichi Namioka
Estimating the term…
Disclosed is a CSP plate holder for use in dicing a CSP plate into individual pellets and in transporting and putting them in a transport tray. The CSP plate holder is composed of a flat plate for sucking and fixedly holding a CSP plate thereon. The flat plate has pellet areas each allotted to each of the individual pellets. Each pellet area has a through hole for sucking and fixedly holding the pellet while the CSP plate is being diced. Each pellet area has at least one suction hole for sucking and fixedly holding the pellet while the CSP plate is being transported. The flat plate has duct passages permitting the suction holes to communicate with a suction source for applying a suction force to the pellet. In addition, the flat plate has at least one minute through hole made in each pellet area.
A CSP plate holder for use in dicing a CSP plate into individual pellets, the CSP plate holder comprising:
A CSP plate holder for use in dicing a CSP plate into individual pellets, the CSP plate holder comprising:
A CSP plate holder for use in dicing a CSP plate into individual pellets, the CSP plate holder comprising:
Dependencies are inferred from the claim text.