Monolithic miniature accelerometer
AssigneeOffice National d'Etudes et de Recherche Aerospatiales (ONERA)
InventorsDenis Janiaud, Olivier Le Traon, Serge Muller
Life of this patent
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Abstract
A monolithic miniature accelerometer machined in a plate of material, comprising a fixed part, two first mobile mass parts referred to as inertial masses, two hinge blades each having one end fastened to one of the two mobile mass parts, and two resonators each having one end fastened to one of the two mobile mass parts, a third mobile mass part fastened to the other end of each of the two resonators and of each of the two hinge blades, and a flexible stem situated between the first two mobile mass parts and connecting the third mobile mass part to the fixed part.
Claims9
A monolithic miniature accelerometer machined in a plate of material, comprising:
- (a) a fixed part,
- (b) two first mobile mass parts;
- (c) two hinge blades each having one end fastened to one of said two mobile mass parts, respectively;
- (d) two resonators, each having one end fastened to one of said two mobile mass parts, respectively;
- (e) a third mobile mass part fastened to the other end of each of said two resonators, respectively, and to the other end of each of said two hinge blades, respectively;
- and
- (f) a flexible stem situated between said first two mobile mass parts and connecting said third mobile mass part to said fixed part.
Dependencies are inferred from the claim text.