Angular velocity sensor

An angular velocity sensor comprising:

• a board in the form of a flat plate;
• a rotational vibrator rotatable about a center of the board, the rotational vibrator being extended to the right and left from a central axis vertical to the board and extending through the center thereof and being supported over the board at the location of the central axis by rotational supporting beams so as to be rotationally vibrated;
• a first vibrator located on a right side of the rotational vibrator and supported by first supporting beams;
• a second vibrator located on a left side of the rotational vibrator and supported by second supporting beams;
• rotational vibration generating means for vibrating the second vibrator backward and forward when the first vibrator is vibrated forward and backward by giving rotational vibration to the rotational vibrator;
• a first displacement detector for detecting a displacement of the first vibrator vibrated to the right and left when an angular velocity is applied around the central axis of the rotational vibrator in the state that rotational vibration is given to the rotational vibrator by the rotational vibration generating means;
• and
• a second displacement detector for detecting a displacement of the second vibrator vibrated to the right and left when an angular velocity is applied around the central axis of the rotational vibrator in the state that rotational vibration is given to the rotational vibrator by the rotational vibration generating means, wherein the rotational vibrator has frame portions in the form of a rectangular frame on both the right and left sides of the rotational vibrator, the first vibrator including a first vibrating portion in the form of the letter “H” inside of a first one of the frame portions, the second vibrator including a second vibrating portion in the form of the letter “H” inside of a second one of the frame portions, the first displacement detector including a first vibrating side electrode provided in the first vibrating portion and a first fixed side electrode arranged inside of the first one of the frame portions and the second displacement detector including a second vibrating side electrode provided in the second vibrating portion and a second fixed side electrode arranged inside the second frame portions.

An angular velocity sensor comprising:

• a support;
• a rotational vibrator;
• rotational support beams connected to the board and the rotational vibrator for supporting the rotational vibrator over the board at a central axis extending vertically from a center of the board;
• a first vibrator located on a first side of the rotational vibrator along a first axis direction and supported by first supporting beams;
• a second vibrator located on a second, opposite side of the rotational vibrator along the first axis and supported by second supporting beams;
• a first vibrational generator for vibrating the first vibrator along a second axis direction transverse to the first axis direction and a second vibrational generator for vibrating the second vibrator along the second axis direction, the first and second vibrational generators causing the first and second vibrators to vibrate in opposite directions of the second axis direction to thereby vibrationally vibrate the rotational vibrator;
• a first displacement detector for detecting a displacement of the first vibrator when both an angular velocity is applied around the central axis of the rotational vibrator and the rotational vibrator is rotationally vibrated;
• and
• a second displacement detector for detecting a displacement of the second vibrator when both an angular velocity is applied around the central axis of the rotational vibrator and the rotational vibrator is rotationally vibrated.

An angular velocity sensor comprising:

• a support;
• a rotational vibrator;
• rotational support beams connected to the board and the rotational vibrator for supporting the rotational vibrator over the board at a central axis extending vertically from a center of the board;
• a first vibrator located on a first side of the rotational vibrator and supported by first supporting beams;
• a second vibrator located on a second, opposite side of the rotational vibrator and supported by second supporting beams;
• a rotational vibration generator for rotationally vibrating the rotational vibrator, the rotational vibrator causing the first and second vibrators to vibrate;
• a first displacement detector for detecting a displacement of the first vibrator when both an angular velocity is applied around the central axis of the rotational vibrator and the rotational vibrator is rotationally vibrated;
• and
• a second displacement detector for detecting a displacement of the second vibrator when both an angular velocity is applied around the central axis of the rotational vibrator and the rotational vibrator is rotationally vibrated, wherein the rotational vibrator has frame portions in the form of a rectangular frame on both the first and second sides, the first vibrator is shaped in the form of the letter “H” inside of the rectangular frame on the first side of the rotational vibrator, the second vibrator is shaped in the form of the letter “H” within the rectangular frame on the second side of the rotational vibration, the first displacement detector includes a first vibrating side electrode provided within the first vibrator and a first fixed side electrode arranged inside the rectangular frame of the first vibrator and the second displacement detector includes a second vibrating side electrode provided within the second vibrator and a second fixed side electrode arranged inside the rectangular frame of the second vibrator.