Probe holder for low current measurements
AssigneeCascade Microtech, Inc.
InventorRandy Schwindt
Life of this patent
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Abstract
A system for low-current testing of a test device includes a probing device for probing a probing site on the test device. The probing device includes a dielectric substrate having first and second sides, an elongate conductive path on the first side of the substrate, an elongate probing element connected to the elongate conductive path so as to extend in a cantilevered manner beyond the substrate, and a conductive area on the second side of the substrate. The probe housing is matingly detachably engageable with the probing device.
Claims26
A system for low-current testing of a test device comprising:
- (a) a probing device for probing a probing site on said test device, said probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side of said substrate, an elongate probing element connected to said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, and a conductive area on said second side of said substrate;
- (b) a probe housing matingly detachably engageable with said probing device;
- (c) said probe housing being engaged with both a first cable that includes a first conductor surrounded by a second conductor and a second cable including a third conductor surrounded by a fourth conductor;
- (d) a first conductive path that electrically interconnects said first conductor, said third conductor, and said elongate conductive path on said first side of said substrate when said probing device is engaged with said probe housing;
- and
- (e) a second conductive path that electrically interconnects said second conductor and said fourth conductor with said conductive area on said second side of said substrate when said probing device is engaged with said probe housing, where said first conductive path is electrically isolated from said second conductive path.
A system for low-current testing of a test device comprising:
- (a) a probing device for probing a probing site on said test device, said probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side of said substrate, an elongate probing element connected to said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, and a conductive area on said second side of said substrate;
- (b) a probe housing matingly detachably engageable with said probing device;
- (c) said probe housing being detachably engageable with both a first cable that includes a first conductor surrounded by a second conductor and a second cable that includes a third conductor surrounded by a fourth conductor;
- (d) a first conductive path that electrically interconnects said first conductor, said third conductor, and said elongate conductive path on said first side of said substrate when said probing device is engaged with said probe housing, said first cable is engaged with said probe housing, and said second cable is engaged with said probe housing;
- and
- (e) a second conductive path that electrically interconnects said second conductor and said fourth conductor with said conductive area on said second side of said substrate when said probing device is engaged with said probe housing.
A probe housing for holding a test device comprising:
- (a) said probe housing matingly detachably engageable with a probing device for probing a probing site on said test device that includes a dielectric substrate having first and second sides, an elongate conductive path on said first side of said substrate, an elongate probing element connected to said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, and a conductive area on said second side of said substrate;
- (b) said probe housing being detachably engageable with both a first cable that includes a first conductor surrounded by a second conductor and a second cable that includes a third conductor surrounded by a fourth conductor;
- (c) a first conductive path that electrically interconnects said first conductor, said third conductor, and said elongate conductive path on said first side of said substrate when said probing device is engaged with said probe housing, said first cable is engaged with said probe housing, and said second cable is engaged with said probe housing;
- and
- (d) a second conductive path that electrically interconnects said second conductor and said fourth conductor with said conductive area on said second side of said substrate when said probing device is engaged with said probe housing.
A system for low-current testing of a test device comprising:
- (a) a probing device for probing a probing site on said test device, said probing device including a dielectric substrate having first and second sides, an elongate conductive path on said first side of said substrate, an elongate probing element connected to said elongate conductive path so as to extend in a cantilevered manner beyond said substrate, and a conductive area on said second side of said substrate;
- (b) a probe housing matingly detachably engageable with said probing device;
- (c) said probe housing being detachably engageable with at least a first cable that includes a first conductor surrounded by a second conductor;
- (d) a first conductive path electrically interconnects said first conductor and said elongate conductive path on said first side of said substrate when said probing device is engaged with said probe housing, and said first cable is engaged with said probe housing;
- and
- (e) a second conductive path electrically interconnects said second conductor with said conductive area on said second side of said substrate when said probing device is engaged with said probe housing, where said first conductive path is electrically isolated from said second connective path.
Dependencies are inferred from the claim text.