US 6,384,519 B1Granted

Micro-dynode integrated electron multiplier

AssigneeNanoSciences Corporation

InventorsCharles P. Beetz, Jr., John Steinbeck, Robert W. Boertsler, David R. Winn

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Abstract

A microdynode electron multiplier provides numerous microchannels extending parallel to one another through a layered structure incorporating insulating spacer layers and dynode layers which either incorporate a conductive electrode layer or are contiguous with a conductive electrode layer. The dynode layers include materials with high electron emissivity. The dynode layers can be biased to different electrical potentials to provide a potential gradient along the length of each microchannel. Multi-stage electron multiplication provides high gain. The device desirably is formed as a monolithic, sealed structure with a cathode structure such as a photocathode and an anode structure. The device can provide a multi pixel imaging device of extremely high sensitivity and resolution.

Claims10

Dependent claims

A microdynode device comprising:

(a) a porous structure defining an entry side, and an exit side, said structure including a plurality of dynode layers and a plurality of electrically insulating spacer layers disposed in alternating sequence between said entry side and said exit side, said structure defining a plurality of elongated microchannels extending side-by-side through said layers, each said microchannel having an entrance aperture adjacent said entry side and an exit aperture adjacent said exit side, and a lengthwise direction between said ends, each said microchannel having a mean diameter less than about 150 microns, said structure defining walls surrounding each microchannel from said entry aperture to said exit aperture and segregating each said microchannel from the other said microchannels;
(b) an electron-emissive material in said microchannels within said dynode layers;
and
(c) means for connecting said dynode layers to biasing voltages
wherein said electron-emissive material is selected from the group consisting of amorphous and crystalline:
(d) Group IV semiconductors;
(e) semiconductors having a composition according to the formula AxB1−xCyD1−y wherein A and B are each independently selected from the group consisting of B, Al, Ga, In, and Tl, wherein C and D are each independently selected from the group consisting of N, P, As, Sb and Bi and wherein x and y are in the range from 0 to 1;
and
(f) n and p types of the semiconductors recited in (d) and (e).

6 more elements

A microdynode device comprising:

(a) a porous structure defining an entry side, and an exit side, said structure including a plurality of dynode layers and a plurality of electrically insulating spacer layers disposed in alternating sequence between said entry side and said exit side, said structure defining a plurality of elongated microchannels extending side-by-side through said layers, each said microchannel having an entrance aperture adjacent said entry side and an exit aperture adjacent said exit side, and a lengthwise direction between said ends, each said microchannel having a mean diameter less than about 150 microns, said structure defining walls surrounding each microchannel from said entry aperture to said exit aperture and segregating each said microchannel from the other said microchannels;
(b) a cathode structure overlying said entry side of said porous structure so that regions of said cathode structure are exposed to said entrance apertures of said microchannels, said regions of said cathode structure exposed to said entrance apertures being adapted to emit electrons;
(c) an anode structure overlying said exit side of said porous structure;
(d) an electron-emissive material in said microchannels within said dynode layers;
and
(e) means for connecting said dynode layers to biasing voltages;
wherein said cathode structure and said anode structure are sealingly connected to said porous structure, to form a unitary sealed structure, and wherein said porous structure, said cathode structure and said anode structure cooperatively maintain a vacuum within said microchannels.

4 more elements

Dependencies are inferred from the claim text.