Treatment of deagglomerated particles with plasma-activated species

In an apparatus for subatmospheric treatment of particle surfaces comprising a reaction zone in a reaction chamber having particle inlet and outlet means, a plasma-generating source, and a particle storage hopper that cooperates with the inlet, the improvement which comprises:

• i. a particle-filled storage hopper designed to operate at a pressure above that of the reaction chamber;
• ii. a module located between the particle storage hopper and the inlet that cooperates with both, the module comprising means for controlling feed rate of the particles and for deagglomerating the particles, and introducing deagglomerated particles into the reaction zone, said means comprising a gas source and an ultrasonic horn having an orifice therein, said orifice sized to maintain a predetermined gas pressure drop between the storage hopper and the reaction chamber at a predetermined gas flow rate;
• and
• iii. means for maintaining the deagglomerated particles at a temperature below that at which they thermally degrade, comprising at least one diffusion plate positioned between the plasma-generating source and the reaction zone to diffuse and reduce the temperature of the plasma from the plasma-generating source.