Method and apparatus for pressure measurement in a CVI/CVD furnace
AssigneeGoodrich Corporation
InventorsRoger A. Ross, Patrick C. Trujillo, Robert Fiala
Life of this patent
Estimating the term…
Abstract
An apparatus to determine the pressure within the furnace during thermal gradient forced flow processes as well as other CVI/CVD processes is disclosed. Further, a method to measure the pressure is also described.
Claims6
Apparatus for measuring pressure within a susceptor volume, within a CVI/CVD furnace having a furnace shell, during a CVI/CVD process wherein a reactant gas is introduced into the CVI/CVD furnace via a reactant gas line which passes through the furnace shell, and wherein the susceptor volume is bounded by susceptor sides, a susceptor lid, and a floor plate, comprising:
- a pressure indicator tube having two ends, a first end and a second end, wherein said first end is in said susceptor volume, and wherein a portion of said pressure indicator tube is located inside the portion of said reactant gas line which passes through the furnace shell;
- and
- a pressure indicator located outside of said CVI/CVD furnace, wherein said second end of said pressure indicator tube is connected to said pressure indicator in fluid communication therewith.
Method for measuring pressure within a susceptor volume, within a CVI/CVD furnace during a CVI/CVD process wherein a reactant gas is introduced into the CVI/CVD furnace via a reactant gas line, and wherein the susceptor volume is bounded by susceptor sides, a susceptor lid, and a floor plate, comprising the steps of:
- passing a pressure indicator tube having two ends, a first end and a second end, through said reactant gas line, such that the first end is in said susceptor volume;
- and
- connecting said second end to a pressure indicator located external to said CVI/CVD furnace, such that said pressure indicator tube is in fluid communication therewith.
Dependencies are inferred from the claim text.