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US 6,382,292 B1Granted
Method and apparatus for separating composite member using fluid
AssigneeCanon Kabushiki Kaisha
InventorsKazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita
Life of this patent
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Abstract
To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.
Claims20
A separation apparatus comprising:
- a holding means for holding a composite member having a plurality of mutually bonded members;
- a jetting means for jetting a fluid against a side surface of the composite member;
- and
- a movement mechanism for relatively moving the composite member and the jetting means;
- wherein the holding means holds the composite member so that the fluid is jetted against an entire periphery of the side surface of the composite member, and
- wherein the composite member is separated at a position different from a bonding position of the plurality of members.
3 more elements
A separation apparatus comprising a first holder for rotatably holding a first surface of a disc-like composite member having a plurality of members as bonded mutually;
- a second holder for rotatably holding a second surface of the disc-like composite member;
- synchronizing means for allowing the first and second holders during rotation to synchronize mutually;
- and a nozzle that jets a fluid against the end surface of the composite member, which is rotating, in order to separate the composite member into a plurality of members using as a starting point the position on which the fluid has been jetted.
A separation apparatus comprising:
- a holding means for holding a composite member having a plurality of mutually bonded members;
- a jetting means for jetting a fluid against a side surface of the composite member;
- and
- a movement mechanism for relatively moving the composite member and the jetting means;
- wherein the holding means holds the composite member so that the fluid is jetted against an entire periphery of the side surface of the composite member, and
- wherein the composite member is separated.
3 more elements
A separation apparatus comprising:
- a holding means for holding a composite member being a plurality of mutually bonded members and having a separation region formed by anodization or ion implantation;
- and
- a jetting means for jetting a fluid against a side surface of the composite member;
- wherein the holding means holds the composite member so that the fluid is jetted against an entire periphery of the side surface of the composite member, and
- wherein the composite member is separated at a position different from a bonding position of the plurality of members.
2 more elements
A separation apparatus comprising:
- a holding means for holding a composite member being a plurality of mutually bonded members and having a separation region formed by anodization or ion implantation;
- and
- means for applying a pressure by a fluid against a side surface of the composite member;
- wherein the holding means holds the composite member so that the fluid is jetted against an entire periphery of the side surface of the composite member, and
- wherein the composite member is separated at a position different from a bonding position of the plurality of members.
2 more elements
A separation apparatus comprising:
- a first holder for holding a first member of a bonded substrate formed by bonding the first member and a second member;
- a second holder for holding the second member of the bonded substrate;
- and
- a nozzle for jetting a fluid against a side surface of the bonded substrate to separate the bonded substrate,
- wherein the first holder and the second holder hold the first member and the second member so that the first member and the second member are synchronously rotated.
2 more elements
Dependencies are inferred from the claim text.