Fluid control apparatus
AssigneesTokyo Electron Limited, Fujikin Incorporated
InventorsKen Ishii, Tsuneyuki Okabe, Yuji Kawano, Michio Yamaji
Life of this patent
Estimating the term…
Abstract
Lower members of each of lines A, B, C, D, E, P are mounted on a subbase panel 3 with screws, upper members 11, 12, 13, 14, 15, 16, 17, 18, 19 of each line are mounted on the lower members with screws, and the subbase panels 3 is mounted on a single main base panel 2. Channel connecting element 50 is removable upward.
Claims12
A fluid control apparatus comprising lines (A), (B), (C), (D), (E), (P) arranged in parallel and each comprising a plurality of lower members (31), (32), (33), (34) arranged in series and a plurality of upper members (11), (12), (13), (14), (15), (16), (17), (18), (19) arranged in series, channels of members of adjacent lines (A), (B), (C), (D), (E), (P) being interconnected by channel connecting means (50), (53), (54) at specified locations, the fluid control apparatus being characterized in that the lower members (31), (32), (33), (34) of each of the lines (A), (B), (C), (D), (E), (P) are mounted on a subbase panel (3) with screws, the upper members (11), (12), (13), (14), (15), (16), (17), (18), (19) of each line being mounted on the lower members (31), (32), (33), (34) with screws, the subbase panels (3) being mounted on a single main base panel (2).
A fluid control apparatus comprising lines (A), (B), (C), (D), (E), (P) arranged in parallel and each comprising a plurality of lower members (31), (32), (33), (34) arranged in series and a plurality of upper members (11), (12), (13), (14), (15), (16), (17), (18), (19) arranged in series, channels of members of adjacent lines (A), (B), (C), (D), (E), (P) being interconnected by channel connecting means (50), (53), (54) at specified locations, the fluid control apparatus being characterized in that the lower members (31), (32), (33), (34) of each of the lines (A), (B), (C), (D), (E), (P) are mounted on a subbase panel (3) with screws, the upper members (11), (12), (13), (14), (15), (16), (17), (18), (19) of each line being mounted on the lower members (31), (32), (33), (34) with screws, the subbase panels (3) being mounted on a single main base panel (2), the channel connecting means (50), (53), (54) being removable upward, wherein one of the upper members (11), (12), (13), (14), (15), (16), (17), (18), (19) is a shutoff-opening device (13) comprising a two-port valve (61) and a three-port valve (62) which are arranged adjacent to each other.
A fluid control apparatus comprising lines (a), (B), (C), (D), (E), (P) arranged in parallel and each comprising a plurality of lower members (31), (32), (33), (34) arranged in series and a plurality of upper members (11), (12), (13), (14), (15), (16), (17), (18), (19) arranged in series, channels of members of adjacent lines (A), (B), (C), (D), (E), (P) being interconnected by channel eonnecting means (50), (53), (54) at specified locations the fluid control apparatus being characterized in that the lower members (31), (32), (33), (34) of each of the lines (A), (B), (C), (D), (E), (P) are mounted on a subbase panel (3) with screws, the upper members (11), (12), (13), (14), (15), (16), (17), (18), (19) of each line being mounted on the lower members (31),(32), (33), (34) with screws, the subbase panels (3) being mounted on a single main base panel (2), the channel connecting means (50), (53), (54) being removable upward, wherein the channel connecting means (50), (53) comprise a block coupling (51) mounted in place with screws driven in from above and having an I-shaped channel (83).
Dependencies are inferred from the claim text.